Agilent Combination VacIon Plus PumpsTitanium Sublimation Pumps
Ion Pumps
Combination VacIon Plus Pumps/Titanium Sublimation Pumps
The VacIon Plus Combination Pumps integrate titanium sublimation pumping to achieve ultra-high vacuum. The Titanium Sublimation Pump (TSP) creates extra high pumping speed for getterable gases while the ion pump handles the non-getterable gases such as argon and methane. The TSP can be added to the ion pump, or used as a separate pumping unit.
Combination Pump configurations are available for the VacIon Plus 150, 300, or 500, and include the cylindrical cryopanel, an extra side or bottom-mounted 8 inch ConFlat flanged port, and a TSP source mounted to the extra port providing extra high water pumping speed.
Agilent offers two types of titanium sublimation pumps: filament and titanium ball sources. Filament-type TSP sources can be turned off between sublimations and thereby avoid thermally-induced outgassing. The ball-type sources contain larger amounts of titanium for longer life when operated under conditions that use more titanium, such as higher operating pressures.
Features
Specifications
Literature
Order Information
Ordering Information
Description Part Number Part Number
4UHV 4UHV
Fast Response
4UHV Controller 1x200W Negative 9299010 9299010M1000
4UHV Controller 1x200W Positive 9299011 9299011M1000
4UHV Controller 2X80W Negative 9299200 9299200M1000
4UHV Controller 2X80W Positive 9299201 9299201M1000
4UHV Controller 2x200W Negative 9299020 9299020M1000
4UHV Controller 2x200W Positive 9299021 9299021M1000
4UHV Controller 1x200W Positive
& 1x200W Negative 9299022 9299022M1000
4UHV Controller 4X80W Negative 9299400 9299400M1000
4UHV Controller 4X80W Positive 9299401 9299401M1000
4UHV Controller 2x80W Positive
& 2x80W Negative 9299402 9299402M1000
4UHV Controller 2x80W Negative
& 1X200W Negative 9299210 9299210M1000
4UHV Controller 2x80W Positive
& 1x200W Positive 9299211 9299211M1000
4UHV Controller 2x80W Positive
& 1x200W Negative 9299212 9299212M1000
4UHV Controller 2x80W Negative
& 1X200W Positive 9299213 9299213M1000
4UHV Controller 1x200W Negative,
Ethernet 7299010 7299010M1000
4UHV Controller 1x200W Positive,
Ethernet 7299011 7299011M1000
4UHV Controller 2X80W Negative,
Ethernet 7299200 7299200M1000
4UHV Controller 2X80W Positive,
Ethernet 7299201 7299201M1000
4UHV Controller 2x200W Negative,
Ethernet 7299020 7299020M1000
4UHV Controller 2x200W Positive,
Ethernet 7299021 7299021M1000
4UHV Controller 1x200W Positive
& 1x200W Negative, Ethernet 7299022 7299022M1000
4UHV Controller 4X80W Negative,
Ethernet 7299400 7299400M1000
4UHV Controller 4X80W Positive,
Ethernet 7299401 7299401M1000
4UHV Controller 2x80W Positive
& 2x80W Negative, Ethernet 7299402 7299402M1000
4UHV Controller 2x80W Negative
& 1X200W Negative, Ethernet 7299210 7299210M1000
4UHV Controller 2x80W Positive
& 1x200W Positive, Ethernet 7299211 7299211M1000
4UHV Controller 2x80W Positive
& 1x200W Negative, Ethernet 7299212 7299212M1000
4UHV Controller 2x80W Negative
& 1X200W Positive, Ethernet 7299213 7299213M1000
4UHV Controller 1x200W Negative,
Profibus 8299010 8299010M1000
4UHV Controller 1x200W Positive,
Profibus 8299011 8299011M1000
4UHV Controller 2X80W Negative,
Profibus 8299200 8299200M1000
4UHV Controller 2X80W Positive,
Profibus 8299201 8299201M1000
4UHV Controller 2x200W Negative,
Profibus 8299020 8299020M1000
4UHV Controller 2x200W Positive,
Profibus 8299021 8299021M1000
4UHV Controller 1x200W Positive
& 1x200W Negative, Profibus 8299022 8299022M1000
4UHV Controller 4X80W Negative,
Profibus 8299400 8299400M1000
4UHV Controller 4X80W Positive,
Profibus 8299401 8299401M1000
4UHV Controller 2x80W Positive
& 2x80W Negative, Profibus 8299402 8299402M1000
4UHV Controller 2x80W Negative
& 1X200W Negative, Profibus 8299210 8299210M1000
4UHV Controller 2x80W Positive
& 1x200W Positive, Profibus 8299211 8299211M1000
4UHV Controller 2x80W Positive
& 1x200W Negative, Profibus 8299212 8299212M1000
4UHV Controller 2x80W Negative
& 1X200W Positive, Profibus 8299213 8299213M1000
Accessories and Cables*
HV bakeable cable, radiation resistant, 4 m (13 ft.), with Interlock 9290705
HV bakeable cable, radiation resistant, 7 m (23 ft.), with Interlock 9290707
HV bakeable cable, radiation resistant, 10 m (33 ft.), with Interlock 9290708
HV bakeable cable, radiation resistant, 20 m (66 ft.), with Interlock 9290709
Rack adapter 19” 9290064
Mains cable NEMA Plug, 3 m (10 ft.) 9699958
Mains cable European Plug, 3 m (10 ft.) 9699957
(*) The unit does not include the power cable, please order the cable separately
Combination VacIon Plus Pumps/Titanium Sublimation Pumps
The VacIon Plus Combination Pumps integrate titanium sublimation pumping to achieve ultra-high vacuum. The Titanium Sublimation Pump (TSP) creates extra high pumping speed for getterable gases while the ion pump handles the non-getterable gases such as argon and methane. The TSP can be added to the ion pump, or used as a separate pumping unit.
Combination Pump configurations are available for the VacIon Plus 150, 300, or 500, and include the cylindrical cryopanel, an extra side or bottom-mounted 8 inch ConFlat flanged port, and a TSP source mounted to the extra port providing extra high water pumping speed.
Agilent offers two types of titanium sublimation pumps: filament and titanium ball sources. Filament-type TSP sources can be turned off between sublimations and thereby avoid thermally-induced outgassing. The ball-type sources contain larger amounts of titanium for longer life when operated under conditions that use more titanium, such as higher operating pressures.
Features
- Getterable gases enter the end of the cylindrical cryopanel and combine with the freshly-deposited titanium.
- Liquid nitrogen cooling the cryopanel increases the efficiency of the gettering process and adds greatly to the water pumping speed.
- The cryopanel may be mounted on the bottom of the pump or the side, providing flexibility when height restrictions are present.
- Customized pump configurations are also available.
Specifications
Features | Specifications |
---|---|
|
VacIon 150 Side Mounted TSP Outline Drawing
VacIon 300 Side Mounted TSP Outline Drawing VacIon 500 Side Mounted TSP Outline Drawing VacIon 300 Bottom Mounted TSP Outline Drawing VacIon 500 Bottom Mounted TSP Outline Drawing Technical Specifications Pumping Speed Curve |
Titanium Sublimation Pumps (TSPs) | Features | Specifications |
---|---|---|
TSP Cartridge | The popular TSP cartridge is provided on a 2 ¾” OD ConFlat flange and contains three titanium-molybdenum filaments, each with 1.1 grams of usable titanium. The cartridge assembly is bakeable to 400 °C. Maximum sublimation is achieved at 300 watts of source power. |
Outline Drawing
Technical Specifications |
Mini Ti-Ball | The Mini Ti-Ball source provides 15.2 grams of usable titanium and is mounted on a 2 ¾” OD ConFlat flange. Maximum sublimation is achieved at 300 watts of source power, while the Standby power requirement is 100 watts. |
Outline Drawing
Technical Specifications |
TSP Cryopanel | Designed for use with the TSP cartridge source*, this sublimation cryopanel is mounted to an 8” OD ConFlat flange. It can operate with water cooling, liquid nitrogen, or uncooled if used at UHV. This cryopanel can be mounted to doubleended or side-ported ion pumps and can also be used independently in any 8” (NW 150) CFF port with 11 inch depth/clearance. |
Outline Drawing
Pumping Speed vs Pressure at different evaporation rates Technical Specifications |
Literature
Agilent 4UHV Ion Pump Controller Brochure
4UHV Ion Pump Controller overview: features and benefits, technical specifications, ordering information, frequently asked questions.
Agilent Ion Pumps Catalog
Catalog of Agilent Ion Pumps. Complete model listing with specifications, drawings, pictures, ordering information and applications.
Ion Pumps History
60 years of history - Agilent Ion Pumps: the invention that made UHV possible
Frequently Asked Questions (FAQs) Ion Pumps
Find the answers to frequently asked questions about Agilent’s ion pumps. FAQs about ion pump operation and best practices, ion pump controllers, titanium sublimation pumps (TSP).
9192541 | Pump, Ion StarCell, for VacIon Plus 150, 150 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 220 V |
9192510 | Pump, Ion Diode, for Vaclon Plus 150, 150 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 120 V |
9192511 | Pump, Ion Diode, for VacIon Plus 150, 150 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 220 V |
9192540 | Pump, Ion StarCell, for VacIon Plus 150, 150 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 120 V |
9192642 | Pump, Ion StarCell, for VacIon Plus 300, 300 L/s, with bottom-mounted cryopanel, TSP cartridge, installed heater 120 V |
9192643 | Pump, Ion StarCell, for VacIon Plus 300, 300 L/s, with bottom-mounted cryopanel, TSP cartridge, installed heater 220 V |
9192611 | Pump, Ion Diode, for VacIon Plus 300, 300 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 220 V |
9160050 | Titanium Sublimation Pump, filament cartridge source, 2.75 inch, ConFlat |
9192613 | Pump, Ion Diode, for VacIon Plus 300, 300 L/s, with bottom-mounted cryopanel, TSP cartridge, installed heater 220 V |
9192612 | Pump, Ion Diode, for VacIon Plus 300, 300 L/s, with bottom-mounted cryopanel, TSP cartridge, installed heater 120 V |
9192610 | Pump, Ion Diode, for VacIon Plus 300, 300 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 120 V |
9192641 | Pump, Ion StarCell, for VacIon Plus 300, 300 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 220 V |
9192640 | Pump, Ion StarCell, for VacIon Plus 300, 300 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 120 V |
9192713 | Pump, Ion Diode, for VacIon Plus 500, 500 L/s, with bottom-mounted cryopanel, TSP cartridge, installed heater 220 V |
9192712 | Pump, Ion Diode, for VacIon Plus 500, 500 L/s, with bottom-mounted cryopanel, TSP cartridge, installed heater 120 V |
9192711 | Pump, Ion Diode, for VacIon Plus 500, 500 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 220 V |
9192710 | Pump, Ion Diode, for VacIon Plus 500, 500 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 120 V |
9192743 | Pump, Ion StarCell, for VacIon Plus 500, 500 L/s, with bottom-mounted cryopanel, TSP cartridge, installed heater 220 V |
9192740 | Pump, Ion StarCell, for VacIon Plus 500, 500 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 120 V |
9192742 | Pump, Ion StarCell, for VacIon Plus 500, 500 L/s, with bottom-mounted cryopanel, TSP cartridge, installed heater 120 V |
9192741 | Pump, Ion StarCell, for VacIon Plus 500, 500 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 220 V |
9240730M017 | TSP CARTRIDGE CABLE |
9240730M015 | TSP CARTRIDGE CABLE |
9240730M013 | TSP CABLE |
9160051 | Titanium Sublimation Pump, replacement filaments, 12/pk |
9299011 | Controller, Vaclon Ion Pumps, 4UHV, 200 W positive |
9299010 | Controller, Vaclon Ion Pumps, 4UHV, 200 W negative |
9299201 | Controller, Vaclon Ion Pumps, 4UHV, two channels, 80 W positive |
9299200 | Controller, Vaclon Ion Pumps, 4UHV, two channels, 80 W negative |
9299211 | Controller, Vaclon Ion Pumps, 4UHV, 2 x 80 W positive and 1 x 200 W positive channels |
9299210 | Controller, Vaclon Ion Pumps, 4UHV, 2 x 80 W negative and 1 x 200 W negative channels |
9299021 | Controller, Vaclon Ion Pumps, 4UHV, Two Channels, 200 W positive |
9299020 | Controller, Vaclon Ion Pumps, 4UHV, Two Channels, 200 W negative |
9299213 | Controller, Vaclon Ion Pumps, 4UHV, 2 x 80 W negative and 1 x 200 W positive channels |
9299212 | Controller, Vaclon Ion Pumps, 4UHV, 2 x 80 W positive and 1 x 200 W negative channels |
9299400 | Controller, Vaclon Ion Pumps, 4UHV, 4 x 80 W negative channels |
9299401 | Controller, Vaclon Ion Pumps, 4UHV, 4 x 80 W positive channels |
9240730 | Cable, high-voltage, titanium sublimation cartridge, 3.5 m |
9160008 | Replacement Mini Ti-Ball source |
9299022 | Controller, Vaclon Ion Pumps, 4UHV, 200 W negative and 200 W positive channels |
9299402 | Controller, Vaclon Ion Pumps, 4UHV, 2 x 80 W positive and 2 x 80 W negative channels |
9240730M001 | TSP CABLE |
9190180 | Titanium sublimation cryopanel, 8 inch, ConFlat flange |
Ordering Information
Description Part Number Part Number
4UHV 4UHV
Fast Response
4UHV Controller 1x200W Negative 9299010 9299010M1000
4UHV Controller 1x200W Positive 9299011 9299011M1000
4UHV Controller 2X80W Negative 9299200 9299200M1000
4UHV Controller 2X80W Positive 9299201 9299201M1000
4UHV Controller 2x200W Negative 9299020 9299020M1000
4UHV Controller 2x200W Positive 9299021 9299021M1000
4UHV Controller 1x200W Positive
& 1x200W Negative 9299022 9299022M1000
4UHV Controller 4X80W Negative 9299400 9299400M1000
4UHV Controller 4X80W Positive 9299401 9299401M1000
4UHV Controller 2x80W Positive
& 2x80W Negative 9299402 9299402M1000
4UHV Controller 2x80W Negative
& 1X200W Negative 9299210 9299210M1000
4UHV Controller 2x80W Positive
& 1x200W Positive 9299211 9299211M1000
4UHV Controller 2x80W Positive
& 1x200W Negative 9299212 9299212M1000
4UHV Controller 2x80W Negative
& 1X200W Positive 9299213 9299213M1000
4UHV Controller 1x200W Negative,
Ethernet 7299010 7299010M1000
4UHV Controller 1x200W Positive,
Ethernet 7299011 7299011M1000
4UHV Controller 2X80W Negative,
Ethernet 7299200 7299200M1000
4UHV Controller 2X80W Positive,
Ethernet 7299201 7299201M1000
4UHV Controller 2x200W Negative,
Ethernet 7299020 7299020M1000
4UHV Controller 2x200W Positive,
Ethernet 7299021 7299021M1000
4UHV Controller 1x200W Positive
& 1x200W Negative, Ethernet 7299022 7299022M1000
4UHV Controller 4X80W Negative,
Ethernet 7299400 7299400M1000
4UHV Controller 4X80W Positive,
Ethernet 7299401 7299401M1000
4UHV Controller 2x80W Positive
& 2x80W Negative, Ethernet 7299402 7299402M1000
4UHV Controller 2x80W Negative
& 1X200W Negative, Ethernet 7299210 7299210M1000
4UHV Controller 2x80W Positive
& 1x200W Positive, Ethernet 7299211 7299211M1000
4UHV Controller 2x80W Positive
& 1x200W Negative, Ethernet 7299212 7299212M1000
4UHV Controller 2x80W Negative
& 1X200W Positive, Ethernet 7299213 7299213M1000
4UHV Controller 1x200W Negative,
Profibus 8299010 8299010M1000
4UHV Controller 1x200W Positive,
Profibus 8299011 8299011M1000
4UHV Controller 2X80W Negative,
Profibus 8299200 8299200M1000
4UHV Controller 2X80W Positive,
Profibus 8299201 8299201M1000
4UHV Controller 2x200W Negative,
Profibus 8299020 8299020M1000
4UHV Controller 2x200W Positive,
Profibus 8299021 8299021M1000
4UHV Controller 1x200W Positive
& 1x200W Negative, Profibus 8299022 8299022M1000
4UHV Controller 4X80W Negative,
Profibus 8299400 8299400M1000
4UHV Controller 4X80W Positive,
Profibus 8299401 8299401M1000
4UHV Controller 2x80W Positive
& 2x80W Negative, Profibus 8299402 8299402M1000
4UHV Controller 2x80W Negative
& 1X200W Negative, Profibus 8299210 8299210M1000
4UHV Controller 2x80W Positive
& 1x200W Positive, Profibus 8299211 8299211M1000
4UHV Controller 2x80W Positive
& 1x200W Negative, Profibus 8299212 8299212M1000
4UHV Controller 2x80W Negative
& 1X200W Positive, Profibus 8299213 8299213M1000
Accessories and Cables*
HV bakeable cable, radiation resistant, 4 m (13 ft.), with Interlock 9290705
HV bakeable cable, radiation resistant, 7 m (23 ft.), with Interlock 9290707
HV bakeable cable, radiation resistant, 10 m (33 ft.), with Interlock 9290708
HV bakeable cable, radiation resistant, 20 m (66 ft.), with Interlock 9290709
Rack adapter 19” 9290064
Mains cable NEMA Plug, 3 m (10 ft.) 9699958
Mains cable European Plug, 3 m (10 ft.) 9699957
(*) The unit does not include the power cable, please order the cable separately