Agilent FRG-700/702 Pirani Inverted Magnetron Gauge
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Technical Specifications
Outline Drawing
FRG-700/702 Pirani Inverted Magnetron Gauge
The Agilent FRG-700 Gauge is a full range gauge that provides two measuring technologies in a single, compact and economical package to measure process and base pressure from 5 x 10-9 mbar to atmosphere (3.8 x 10-9 Torr to atmosphere). The single, compact unit with one logarithmic analog output signal, significantly reduces the complexity of installation, setup and integration. The benefits are reduced cost and a marked reduction in valuable space requirements. The FRG-702 is the all-metal version of the FRG-700, incorporating a metal-sealed feedthrough. It can be operated at higher temperatures (max. 150º C at flange) than the FRG-700 (max. 55º C at flange).
Features
Specifications| FRG702REPR | Repair Kit, FRG-702 Full Range Gauge |
| FRG702KF25 | FRG-702 full range Pirani/inverted magnetron combination gauge, KF25, all metal, bakeable |
| FRG702CF35 | FRG-702 full range Pirani/inverted magnetron combination gauge, DN40 2.75 inch ConFlat flange, all metal, bakeable |
| FRG702KF40 | FRG-702 full Range Pirani/inverted magnetron gauge, KF40 |
Features
- Provides 2 measuring technologies in a single, compact, economical package
- Measures process and base pressure from 5 x 10-9 mbar to atmosphere (3.8 x 10-9 Torr to atmosphere)
- A single, compact unit with one logarithmic analog output signal significantly reduces the complexity of installation, setup and integration
- Ideal for high vacuum pressure monitoring, base pressure for evaporation and sputtering systems, and general vacuum measurement and control in the medium and high vacuum range
- Wide measurement range from 5 x 10-9 mbar to atmosphere
- No filament to burn out
- Excellent ignition properties
- Easy to clean
Technical Specifications
| FRG-700/702 Full-Range Gauge Tubes | |||||||
| Measurement range | 5 x 10-9 to 1000 mbar (3.8 x 10-9 to 760 Torr) | ||||||
| Accuracy | ± 30 % of reading, typical | ||||||
| Repeatability | ± 5 % of reading, typical | ||||||
| Mounting orientation | Any | ||||||
| Admissible temperature (ambient) | Operation Storage | Bake-out* | (Pirani) | Filament Temperature | |||
| 5 to 55 °C | –40 to +65 °C | 150 °C | 120 °C | ||||
| Supply voltage | At gauge | Ripple | Power consumption | ||||
| 15 to 30 VDC | ≤1 Vpp | ≤2 W | |||||
| Output signal (measurement signal) | Voltage range | Measurement range | |||||
| 0 to 10.5 V | 1.82 to 8.6 V | ||||||
| Voltage vs. pressure | 0.6 V/decade, logarithmic | ||||||
| Error signal | <0.5 V (no supply), >9.5 V (Pirani sensor, filament rupture) | ||||||
| Minimum loaded impedance | 10 kΩ, short-circuit proof | ||||||
| Response time | <10 ms (@ p> 10-6 mbar), ≈1000 ms (@ p= 10-8 mbar) | ||||||
| Identification gauge | 85 kΩ, referenced to supply common | ||||||
| Status | Pirani-only mode | Combined Pirani/cold cathode mode | LED | ||||
| 0 V (low) | 15 V to 30 (high) | LED green high voltage on | |||||
| Electrical connection | FCC 68 appliance connector, 8 poles, female | ||||||
| Sensor cable | 8 poles plus shielding | ||||||
| Maximum cable length | ≤ 50 m | ||||||
| Operating voltage/current | ≤3.3 kV/≤500 A | ||||||
| Materials exposed to vacuum | SS, Al2O3, FPM75, Mo, Ni, Au, W | ||||||
| Internal volume | ≈ 20 cm3 | ||||||
| Weight | DN 25 ISO-KF ≈700g, DN 40 CF ≈980g | ||||||
| Standards | EN 61000-6-2, EN 61000-6-3, EN 61010-1 | ||||||
