Agilent CDG-500 Capacitance Diaphragm Gauge Agilent / Varian Vacuum Measurement Vacuum Products Malaysia, Penang, Singapore, Indonesia Supplier, Suppliers, Supply, Supplies

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Agilent CDG-500 Capacitance Diaphragm Gauge

CDG-500 Capacitance Diaphragm Gauge

The Agilent CDG-500 series of temperature compensated Capacitance Diaphragm gauges provides a high level of accuracy in the high-pressure region. Full-scale measurement ranges are available from 1000 Torr to 1 Torr. The CDG-500 series uses a corrosion resistant ultra pure alumina ceramic diaphragm providing exceptional signal stability, fast recovery from atmosphere, short warm-up times and unparalleled robustness.


CDG500T1000KF16	CDG-500, capacitance diaphragm gauge, 1000 Torr, KF16
CDG500T0010VCR8	CDG-500, capacitance diaphragm gauge, 10 Torr, VCR8
CDG500T0001VCR8	CDG-500, capacitance diaphragm gauge, 1 Torr, VCR8
CDG500T0100KF16	CDG-500, capacitance diaphragm gauge, 100 Torr, KF16
CDG500T0100VCR8	CDG-500, capacitance diaphragm gauge, 100 Torr, VCR8
CDG500T0001KF16	CDG-500, capacitance diaphragm gauge, 1 Torr, KF16
CDG500T0010KF16	CDG-500, capacitance diaphragm gauge, 10 Torr, KF16
CDG500T1000VCR8	CDG-500, capacitance diaphragm gauge, 1000 Torr, VCR8
CDG500T0010KF16S	CDG-500 capacitance diaphragm gauge, 10 Torr, with setpoints, KF16
CDG500T0100VCR8S	CDG-500 capacitance diaphragm gauge, 100 Torr, with setpoints, VCR8
CDG500T1000KF16S	CDG-500 capacitance diaphragm gauge, 1000 Torr, with setpoints, KF16
CDG500T0100KF16S	CDG-500 capacitance diaphragm gauge, 100 Torr, with setpoints, KF16
CDG500T0001VCR8S	CDG-500 capacitance diaphragm gauge, 1 Torr, with setpoints, VCR8
CDG500T0001KF16S	CDG-500 capacitance diaphragm gauge, 1 Torr, with setpoints, KF16
CDG500T0010VCR8S	CDG-500 capacitance diaphragm gauge, 10 Torr, with setpoints, VCR8
CDG500T1000VCR8S	CDG-500 capacitance diaphragm gauge, 1000 Torr, with setpoints, VCR8

Features

Full scale ranges from 1 to 1000 Torr with push button zeroing and optional set point control providing ease of integration
Excellent long term signal stability and repeatability
Fast recovery from atmospheric pressures and rapid stabilization after start-up reduces process cycle times
Application robustness is achieved through a corrosion-resistant ceramic sensor with sensor-shielding protection

Specifications
Technical Specifications

Measurement range (full scale)	Torr		1000	100		10		1
	Pa		133,322	13,332		1,333		133
	mbar		1333	133		13.3		1.3
	% of reading		0.2	0.2		0.2		0.2
Temperature effect On zero	On zero	% F.S. / °C	0.005	0.005		0.005		0.015
	On span	% of reading/ °C	0.01	0.01		0.01		0.01
Resolution	% F.S.		0.003	0.003		0.003		0.003
Pressure, maximum	kPa (absolute)		400	260		260		260
Lowest reading	% F.S.		0.01
Lowest suggested reading	% F.S.		0.05
Lowest suggested control pressure	% F.S.		0.05
Temperature			Operation (ambient)		Bakeout (at flange)2		Storage
			5 to 50 °C		<110 °C		–40 to 65 °C
Supply voltage			14 to 30 VDC
Power consumption			<1 W
Output signal (analog)			0 to 10 VDC
Response time			30 ms
Degree of protection			IP30
Electrical connection			D-sub, 15 pole, male
Setpoints3 – Two (2) setpoints, SP 1 and SP 2			Relay Contact			Hysteresis
			30 VDC; <0.5 ADC			1% of F.S
Materials exposed to vacuum			Aluminum oxide ceramic (Al2O3), Vacon 704, stainless steel (AlSl 316L5) AgCuTi hard solder, sealing glass

1 Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after 2 hours operation
2 Non-operating
3 CDG-500 setpoint versions only
4 28% Ni, 23% Co, 49% Fe
5 18% Cr, 10% Ni, 3% Mo, 69% Fe
Outline Drawing

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