EVP Series Dry Scroll Vacuum Pump
EVP Series Dry Scroll Vacuum Pump
Model (pumping speed) : EVP-150 (7m3/hr), EVP-300 (15.5m3/hr), EVP-600 (31.3m3/hr), EVP-1000 (59.8m3/hr)Main Applications£º
It is used widely in Semiconductor Industry, Pharmaceutical industry, vacuum packing and scientific and chemical analysis. It can work well with below:
1. Photovoltaic production line
2. Lithium battery manufacturing process
3. Freezer dryer
4. Film preparation equipment
5. As backing pump of molecular pump.
6. Used for scientific and chemical analysis
7. An aux.pump in oil-free pumping system
8. Used in enclosing room in sem-conductor fab. equipments
9. An aux.pump in electron miscrope
10. Used in IC equipment
Technical Features£º
Invulnerable to exterior dust contamination;
Interior oil-free, clean vacuum assured;
Smooth running, low noise;
Water cooling unneeded, corrosion-proof;
Easy operation, low maintenance expense;
Advantage£º
1.EVP dry scroll pump is designed by reference of the design of Edwards, Varian, Iwata.
2.Same seal & gasket of Japan Anest Iwata.
3.Fast delivery.
Technical Data£º
Item | Technical Specifications £¨50hz£© | |||
Model | EVP-300 | EVP-600 | EVP-1000 | |
Nominal capacity | 4 L/s | 8 L/s | 16 L/s | |
Ultimate pressure | 3Pa | 3Pa | 3Pa | |
Water vapor treatment capacity (gas ballast open) | 25g/day | 25g/day | 25g/day | |
Motor Data | 0.55KW | 0.75KW | 1.5KW | |
Rotary speed | 1450rpm | 1450rpm | 1450rpm | |
Temperature | 5~40¡æ | |||
Noise | £¼65dB | £¼65dB | £¼68dB | |
Noise (gas ballast) | £¼70dB | £¼70dB | £¼74dB | |
Gas inlet | KF25 | KF40 | KF40 | |
Gas outlet | KF25 | KF25 | KF40 | |
Dimension | 470X270X364 | 490X340X370 | 560X390X420 | |
£¨LXWXH£© | (mm) | |||
Weight | 35Kg | 44Kg | 64Kg |