EVP Series Dry Scroll Vacuum Pump
EVP Series Dry Scroll Vacuum Pump EVP Dry Scroll Pumps Vacuum Products Malaysia, Penang, Singapore, Indonesia Supplier, Suppliers, Supply, Supplies | Hexo Industries (M) Sdn Bhd

EVP Series Dry Scroll Vacuum Pump

Model (pumping speed) : EVP-150 (7m3/hr), EVP-300 (15.5m3/hr), EVP-600 (31.3m3/hr), EVP-1000 (59.8m3/hr)


Main Applications£º

It is used widely in Semiconductor Industry, Pharmaceutical industry, vacuum packing and scientific and chemical analysis. It can work well with below:
1. Photovoltaic production line
2. Lithium battery manufacturing process
3. Freezer dryer
4. Film preparation equipment
5. As backing pump of molecular pump.
6. Used for scientific and chemical analysis

7. An aux.pump in oil-free pumping system
8. Used in enclosing room in sem-conductor fab. equipments
9. An aux.pump in electron miscrope
10. Used in IC equipment


Technical Features£º

Invulnerable to exterior dust contamination;

Interior oil-free, clean vacuum assured;

Smooth running, low noise;

Water cooling unneeded, corrosion-proof;

Easy operation, low maintenance expense;


Advantage£º

1.EVP dry scroll pump is designed by reference of the design of Edwards, Varian, Iwata.
2.Same seal & gasket of Japan Anest Iwata.
3.Fast delivery.


Technical Data£º

 

Item    Technical Specifications £¨50hz£©
Model EVP-300 EVP-600 EVP-1000
Nominal capacity 4 L/s 8 L/s 16 L/s
Ultimate pressure 3Pa 3Pa 3Pa
Water vapor treatment capacity (gas ballast open) 25g/day 25g/day 25g/day
Motor Data 0.55KW 0.75KW 1.5KW
Rotary speed 1450rpm 1450rpm 1450rpm
Temperature 5~40¡æ
Noise £¼65dB £¼65dB £¼68dB
Noise (gas ballast) £¼70dB £¼70dB £¼74dB
Gas inlet KF25 KF40 KF40
Gas outlet KF25 KF25 KF40
Dimension 470X270X364 490X340X370 560X390X420
£¨LXWXH£© (mm)
Weight 35Kg 44Kg 64Kg





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