Introduction:

CXF Maglev Turbomolecular Pumps are the first choice for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration. The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. Hence no abrasion existed on pump chamber, it cause pump having a super long service life. As well as giving very low vibration, the elimination of contact means no bearing contact when rotor is rotating and no requirement for consequent pump maintenance.

Advantage:

Oil free to achieve supper clean vacuum;

Maintenance free for no abration inside pump chamber, very economical for long operation;

Small vibration & low noise to gain pleasure working environmen;

Rotation speed adjustable to achieve meet quest on different capacity;

Compact size to save space;

Easy intallation for being able to be installed in any position;

High fore pressure resistance.

Application:

semi-conductor manufacturing, glass coating, solar cell, electron microscope, metallurgy, plasma technology, medicine equipment, etc

Specifications:

FB series Hybrid molecular pump & turbo molecular pump

Model : CXF-200/1400 ,  CXF-250/2300 , CXF-320/3000