Agilent TwisTorr 84 FS Agilent / Varian Turbo Pumps Vacuum Products Malaysia, Penang, Singapore, Indonesia Supplier, Suppliers, Supply, Supplies

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Agilent TwisTorr 84 FS

The Agilent 80 L/s turbo pump, TwisTorr 84 FS, combines TwisTorr drag stage technology and Agilent Floating Suspension (FS) to provide high performance, reliability, and economy. This 80 L/s turbo pump delivers high vacuum performance thanks to the synergy between turbo technology and innovative TwisTorr drag stages. Floating Suspension assures low vibration and acoustical noise for compatibility with sensitive instrumentation and work environments.

This small turbo pump is perfectly suited for a wide range of applications, including research and development, UHV systems, nuclear research and electron microscopy.

The TwisTorr 84 FS is available with onboard or rack controllers.

Features

Innovative TwisTorr technology - High compression ratio for light gases and very compact rotor design provides high performance and minimal system footprint.
High Foreline Tolerance - Permits use of smaller backing pump, thereby reducing system cost and size.
Agilent Floating Suspension - Low vibration and acoustical noise, optimal bearing working conditions, extended operating life all optimize cost-of-ownership, minimize system downtime, and assure stable performance over time.
Unique bearing & dry lubrication - Maintenance free, oil free; allows installation in any orientation.
Copper water cooling channel (optional) - Eliminates corrosion risk and optimizes heat transfer, and reduces water consumption and cost of ownership.
Typical Turbo Pump Applications
Download 84 FS 3D Models

Specifications

Technical Specifications

Pumping speed: With CFF 4 ½” or ISO 63: With CFF 2 ¾”: With KF 40:	N2: 67 l/s N2: 56 l/s N2: 49 l/s	He: 63 l/s/ He: 46 l/s He: 38 l/s	H2: 53 l/s H2: 40 l/s H2: 36 l/s	Ar: 66 l/s Ar: 57 l/s Ar: 44 l/s
Gas throughput at full rotational speed (with recommended forepump) Air cooling (35 °C) Water cooling (25 °C, 65 l/h)	N2: 100 sccm N2: 100 sccm	Ar: 70 sccm Ar: 70 sccm
Compression ratio:	N2: ≥1 x 1011	He: 2 x 106	H2: 5 x 104	Ar: >1 x 1011
*Base pressure (with recommended forepump)**	<5 x 10-10 mbar (< 3.75 x 10-10 Torr)
Inlet flange	CFF 4 ½” O.D. CFF 2 ¾” O.D.	ISO 63 KF40
Foreline flange	KF 16 NW
Rotational speed	81,000 rpm (1350 Hz driving frequency)
Start-up time	<2 minutes
Recommended forepump	Mechanical: Agilent DS 40M - DS 102 Dry pump: Agilent IDP-3, SH 110
Operating position	Any
Operating ambient temperature	+5 °C to +35 °C
Relative humidity of air	0 - 90 % (not condensing)
Bakeout temperature	120 °C at inlet flange max. (CFF flange) 80 °C at inlet flange max. (ISO flange)
Lubricant	Permanent lubrication
Cooling requirements	Air Cooling: Water Cooling:	Air flow temperature +5 °C to +35 °C Cooling water temperature: +15 °C to +25 °C Minimum flow: 65 l/h (0.30 GPM) Pressure: 2 to 4 bar (45 to 75 psi)
Noise pressure level (at 1 mt at full speed)	40 dB(A) *
Storage temperature	-40 °C to +70 °C
Max altitude	3000 m
Certifications	CE, C-CSA-US, RoHS compliant as per 2011/65/UE
Weight kg (lbs):	Pump ISO 63: 2.5 (5.5)	Pump CFF 4½” : 3.5 (7.7)	Pump CFF 2 ¾”: 3.34 (7.35)	Pump KF 40: 2.37 (5.22)

* Average value ± 4 dB(A) std deviation

Ordering Information

Pumps                                                                                       Configuration Options
TwisTorr 84 FS ISO 63 X3502-64000
TwisTorr 84 FS KF 40 X3502-64001
TwisTorr 84 FS CFF 4.5” X3502-64002
TwisTorr 84 FS CFF 2.75”                                                         X3502-64003

Controllers                                                                                 Part Numbers
TwisTorr 84 FS AG Rack controller RS232/485 X3508-64001
TwisTorr 84 FS AG Rack controller Profibus X3508-64002
TwisTorr 84 FS onboard controller 110/220V X3509-64000
TwisTorr 84 FS onboard controller 24V X3509-64001
TwisTorr 84 FS PCB Controller X3510-64000

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